Valuation on MEMS Pressure Sensors and Device Applications
نویسندگان
چکیده
The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications. Keywords—Pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS.
منابع مشابه
A Critical Review of Carbon Nanotube based MEMS Piezoresistive Pressure Sensor for Medical Application
This paper discuss about the critical review on design of carbon nanotube based MEMS piezoresistive pressure sensors, use of different types of carbon nanotubes such as multi-walled carbon nanotubes (MWCNTs), single-walled carbon nanotubes (SWNTs) and vertically aligned carbon nanotubes (VANTs), sensing mechanism, applications, etc. The structural deformation of the piezoresistive nano structur...
متن کاملAccurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress
In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...
متن کاملBridge Local Scour Monitoring System Using MEMS Sensor Zigbee Network
Wireless MEMS sensors network has been widely used in many fields. In this paper the MEMS pressure sensor is integrated on a sensor board with Zigbee sensor network for real-time local bridge scour depth monitoring during a flood. The wireless MEMS pressure sensor scour monitoring system has been developed and tested in the laboratory. Local scour is one of the major factors for bridge failure....
متن کاملPassive wireless MEMS microphones for biomedical applications.
This paper introduces passive wireless telemetry based operation for high frequency acoustic sensors. The focus is on the development, fabrication, and evaluation of wireless, battery-less SAW-IDT MEMS microphones for biomedical applications. Due to the absence of batteries, the developed sensors are small and as a result of the batch manufacturing strategy are inexpensive which enables their u...
متن کاملA Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications
The use of MEMS sensors has been increasing in recent years. To cover all the applications, many different readout circuits are needed. To reduce the cost and time to market, a generic capacitance-to-digital converter (CDC) seems to be the logical next step. This work presents a configurable CDC designed for capacitive MEMS sensors. The sensor is built with a bridge of MEMS, where some of them ...
متن کامل